Applying the exclusive Si-Fusion patent to achieve slicon to silicon fusion. The silicon boat by Sifusion technology can stand 1100 - 1200 °C in the HT process and the poly-Si CVD process
Technical Superiority

1.It is available to customize design of silicon boat structure. including the shape, length, angle, quntity of tooth

2.High-temperature silicon boats can effectively reduce the contact damage of silicon wafers, and improve process yield

3.Fused silicon boats can be replaced or fixed. It reduces the holding cost

4.Silicon boat has a higher polysilicon deposition upper limit, which can effectively reduce the PM frequency of equipment and increase production capacity

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